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Nanofabrication Technology for Biomedical, Electrical, and Optical Devices and Microsensors

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Stella W. Pang

Department of Electrical Engineering and Computer Science

University of Michigan

Ann Arbor, MI 48109, USA

Telephone: 734-936-2962

Fax: 734-763-9324

Email: pang@umich.edu

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Research Projects:

1. Nanoprinting in Metal and Ceramics
2. Reversal Nanoimprint over Topography to Form Multilayer Three-Dimensional Nanostructures
3. Polymer Inking to Form Stacked Patterns with Smooth Edges and Vertical Sidewalls
4. Stability of Functional Polymers after Imprinting
5. Three-Dimensional Nanochannels Formed by Nanoimprint
6. Three-Dimensional Nanostructures by Reversal UV Imprint
7. Effects of Nanoimprinted Patterns in Tissue-Culture Polymer on Cell Behavior
8. Stretching and Immobilization of DNA Molecules in Si Channels with Integrated Electrodes
9. Multiple-Stage Microfabricated Preconcentrator-Focuser for Gas Chromatography System
10. Thick and Thermally Isolated Si Microheaters for Microfabricated Preconcentrators
11. Surface Damage Induced by Dry Etching
12. Merged Process for Thick Resonators with Circuitry
13. High Sensitivity Submicrometer Si Resonators
14. Dry Etching Technology for High Aspect Ratio and Submicrometer Sensors
15. Precisely Controlled, Self-Aligned Si Field Emission Devices
16. Nanofabrication Technology for Quantum Effect Device
17. Single Electron Transistors and In Plane Gated Quantum Wire Transistors
18. Horizontal Distributed Bragg Reflector Mirrors for Waveguide Lasers
19. Emitter Etching and Endpoint Detection of Heterojunction Bipolar Transistors

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Last Updated: November 19, 2007

E-Mail: pang@umich.edu