Current Research Projects:
1. Performance of Preconcentrator/Focuser with Microfabricated Si Heater
2. Thick and Thermally Isolated Microheaters for Preconcentrator/Focuser
3. Freestanding, High Aspect Ratio Microheaters in Si
4. High Precision Micromachining Technology for Resonators and Optical Switches
5. Merged Process for Thick Resonators with Circuitry
6. High Sensitivity Submicrometer Si Resonators
7. Dry Etching Technology for High Aspect Ratio and Submicrometer Sensors
8. Precisely Controlled, Self-Aligned Si Field Emission Devices
9. Surface Damage Induced by Dry Etching
10. Nanofabrication Technology for Quantum Effect Device
11. Single Electron Transistors and In Plane Gated Quantum Wire Transistors
12. Nanoprinting in Metal and Polymer Using SiC Molds
13. Horizontal Distributed Bragg Reflector Mirrors for Waveguide Lasers
14. Emitter Etching and Endpoint Detection of Heterojunction Bipolar Transistors

Last Updated: October 23, 2002
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