The Resonant MEMS Group is involved in several exciting research projects in the devices and integrated microsystem area. Review the highlights below and select a title to read the full research project.
High-Performance Integrated RF Tunable Components and Filters Advanced RF front-end filters are required to support a wide frequency range while offering a low insertion loss and fast tuning speed in a small-size package. This project targets low-loss, high-performance filters on CMOS-grade silicon substrate using a high-aspect-ratio silver micromachining technique. Read more
RF Switches using Phase Change Materials We investigate the use of Germanium Telluride (GeTe) phase change material for RF switching applications. GeTe switches show several orders of magnitude change in resistivity when thermally transitioned between amorphous and crystalline states. Read more
Chip Scale Ultra-Stable Clocks This multidisciplinary project combines material engineering, mechanical design innovation, and circuit-level design
techniques to achieve state-of-the art performance in micromechanical timing units for space applications Read more