Return to Research Highlights

High-Performance Integrated RF Tunable Components and Filters

Muzhi Wang, Feng Lin

Sponsors: DARPA DARPA and Harris Inc. and NSF Harris Inc. and NSF

Advanced radios need to support an increasing number of frequencies and standards. Current technologies based on fixed components are not scalable and integration of fixed modules into the radio results in increased complexity and cost. For these reasons, there is an increasing demand for reconfigurable/tunable front-end modules. In this project, we develop high-performance tunable passives, switches, and reconfigurable filters using MEMS technologies. We have recently demonstrated a tunable filter covering the frequency range of 600 MHz to 1 GHz with insertion loss of less than 3.6 dB. This is believed to be one of the highest performance fully-integrated filters operating at sub-gigahertz frequencies. We are now investigating different approaches using MEMS components and phase change switches to achieve improved performance.

Related News: Chip lets phones roam to just about any cellular network

Y. Shim, G. Hummel, and M. Rais-Zadeh, "RF switches using phase change materials," IEEE International Conference on Microelectromechanical Systems (MEMS’13), Taipei, Taiwan, pp. 237-240, Jan. 2013.

Y. Shim, Z. Wu, and M. Rais-Zadeh, "MEMS tunable bandstop and bandpass filters," USNC-URSI National Radio Science Meeting, no proceeding, Boulder, CO, Jan. 2013.

Y. Shim, Z. Wu, and M. Rais-Zadeh, "A high-performance continuously tunable MEMS bandpass filter at 1 GHz," IEEE Transaction on Microwave Theory and Technique (TMTT), pp.2439-2747, Aug. 2012.

Y. Shim, Z. Wu, and M. Rais-Zadeh, "A multi-metal surface micromachining process for tunable RF MEMS passives," IEEE Journal of Microelectromechanical Systems (JMEMS), pp.867-874, Aug. 2012.

Z. Wu, Y. Shim, and M. Rais-Zadeh , "Miniaturized UWB filters integrated with tunable notch filters using a silicon-based integrated passive device technology," IEEE Trans. on Microwave Theory and Techniques (TMTT), pp. 518-527, March, 2012.

Y. Shim, J. Ruan, Z. Wu, and M. Rais-Zadeh, "An integrated RF MEMS tunable filters," IEEE International Conference on Microelectromechanical Systems (MEMS'12), Paris, France, Feb. 2012.

M. Rais-Zadeh, "Design and fabrication considerations in developing high-Q MEMS capacitors and inductors," IEEE 11th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF'11), Phoenix, Arizona, Jan. 2011, invited.

Y. Shim, Z. Wu, and M. Rais-Zadeh, "A high-performance temperature-stable continuously tuned MEMS capacitor," IEEE International Conference on Microelectromechanical Systems (MEMS'11), Cancun, Mexico, Jan. 2011.

Z. Wu, Y. Shim, and M. Rais-Zadeh, "Miniaturized UWB bandpass filters integrated with notch filters using a silicon-based integrated passive device technology," IEEE International Microwave Symposium (IMS'11), pp.1-4, Baltimore, MD, 2011.

Z. Wu, Y. Shim, and M. Rais-Zadeh, "Switchable wide tuning range bandstop filters for frequency-agile radios," IEEE International Electron Device Meeting (IEDM'11), pp. 493-496, Washington, DC, 2011.

Y. Shim, R. Tabrizian, F. Ayazi, and M. Rais-Zadeh, "Low-loss MEMS filters with improved out-of-band rejection by exploiting inductive parasitics," IEEE International Electron Device Meeting (IEDM'09), Baltimore, USA, Dec. 2009.

M. Rais-Zadeh, H. M. Lavasani, and F. Ayazi, "An integrated 800MHz coupled-resonator tunable bandpass filter in silver with a constant bandwidth," IEEE Journal of Microelectromechanical Systems (JMEMS), vol. 18, no.4, pp.942-949, 2009.

M. Rais-Zadeh, A. Kapoor, H. M. Lavasani, and F. Ayazi, "Fully integrated low-loss bandpass filters for wireless applications," Journal of Micromechanics and Microengineering (JMM), pp. 1-8, vol. 9, 2009.

M. Rais-Zadeh, J. Laskar, and F. Ayazi, "High performance inductors on CMOS-grade trenched silicon substrate," IEEE Trans. Components and Packaging Technologies, vol. 31, no. 1, pp. 126-134, 2008.

M. Rais-Zadeh, P. A. Kohl, and F. Ayazi, "MEMS switched tunable inductors," IEEE Journal of Microelectromechanical Systems, vol. 17, no. 1, pp. 78-84, 2008.

M. Rais-Zadeh, A. K. Samarao, P. Monajemi, and F. Ayazi, "Low-voltage large-value tunable capacitors using self-aligned HARPSS," IEEE International Conference on Microelectromechanical Systems (MEMS'08), pp. 319-322, Tucson, AZ, 2008.

M. Rais-Zadeh and F. Ayazi, "Small-bandwidth integrated tunable bandpass filters for GSM applications," IEEE International Conference on Microelectromechanical Systems (MEMS'08), pp. 1032-1035, Tucson, AZ, 2008.

M. Rais-Zadeh, P. A. Kohl, and F. Ayazi, "A packaged micromachined switched tunable inductor," IEEE International Conference on Microelectromechanical Systems (MEMS'07), pp. 799-802, Kobe, Japan, 2007.

M. Rais-Zadeh, H. M. Lavasani, and F. Ayazi, "CMOS-compatible encapsulated silver bandpass filters," IEEE Microwave Symposium (IMS'07), pp. 1301-1304, Honolulu, HI, 2007.

M. Rais-Zadeh and F. Ayazi, "High-Q tunable silver capacitors for RFIC's," IEEE Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF'07), pp. 169-172, Long Beach, CA, 2007.

M. Rais-Zadeh, P. A. Kohl, and F. Ayazi, "High-Q micromachined silver passives and filters," IEEE International Electron Device Meeting (IEDM'06), pp. 1-4, San Francisco, CA, 2006.

M. Rais-Zadeh and F. Ayazi, "Characterization of high-Q spiral inductors on thick insulator-on-silicon," Journal of Micromechanics and Microengineering, vol. 15, pp. 2105-2112, 2005.

M. Raieszadeh, P. Monajemi, S. W. Yoon, J. Laskar, and F. Ayazi, "High-Q integrated inductors on trenched silicon islands," IEEE International Conference on Microelectromechanical Systems (MEMS '05), pp. 199-202, Miami, FL, 2005.

Copyright © 2016 The University of Michigan