Resonant MEMS Group News

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Recent News

Congratulations to Mohsen on his accepted paper on an ultrafast optical shutter exploiting total light absorption in a phase-change material to SPIE Photonics West conference.
SPIE - 02/02/2017
This is a result of our collaborative project with Prof. Jay Guo. Presentation will be on Jan. 31, 2017.

Observation of acoustoelectric effect in micromachined Lamb wave delay lines with AlGaN/GaN heterostructure is reported at IEDM this year
IEEE - 12/09/2016
Haoshen will present his paper on Wednesday December 7 at 2016 Int’l Electron Devices Meeting

Congratulations to Milad on having his paper accepted to the IEEE Sensors conference
IEEE - 11/02/2016
The paper is entitled "AlN-on-Si Resonant IR Sensor Array with Large Temperature Coefficient of Frequency" and will be presented at the IEEE Sensors conference in Orlando this year. Azadeh is a co-author on this paper.

Congratulations to Azadeh on her new position: Assistant Professor of Electrical and Computer Engineering, Georgia Institute of Technology
Resonant MEMS - 10/05/2016
Azadeh will start her faculty position in September 2017. Till then she will stay as a post doc at Caltech. Good luck to her.

 

News Archive

Congratulations to Dr. Adam on successfully defending his Ph.D.
Resonant MEMS Group - 07/22/2016
Adam is now headed to Raytheon.

Congratulations to Azadeh for successfully defending her Ph.D.
Resonant MEMS Group - 05/26/2016
Her thesis is entitled "GaN integrated microsystems for RF applications." She is now a Post Doctoral Scholar at Caltech

New patent issued on "phase change RF switches"
USPTO - 04/15/2016
Our patent on directly heated phase change switch is now issued. The intention describes "An RF switch with a direct heating method. The RF switch is comprised of two RF electrodes disposed on opposing sides of a phase change element. Depending on the state of the phase change material, the RF electrodes form a conductive path through the phase change material for an RF signal. To control the state of the phase change material, the RF switch further includes a heater formed from two heater electrodes. The two heater electrodes are configured to draw a current through the phase change element in a direction transverse to the conductive path."

Mina Rais-Zadeh receives 2016 EECS Outstanding Achievement Awards
EECS - 02/01/2016
The EECS Outstanding Achievement Awards are presented annually to faculty members for their outstanding accomplishments in teaching, research, and service. Mina receives this award for "For outstanding contributions to research in high frequency MEMS and piezoelectric semiconductor transducers, and for excellence in teaching and service."

Muzhi to present a paper on the first demonstration of phase change microwave filters at SiRF 2016 conference
RWW 2016 - 01/27/2016
The paper is entitled "An X-band reconfigurable bandpass filter using phase change RF switches" and reports on a switchable x-band filter using GeTe phase change RF switches

Our paper on phase change RF filters is nominated for best paper award at SiRF 2016 conference
SiRF 2016 - 01/27/2016
The paper is entitled "An X-band reconfigurable bandpass filter using phase change RF switches" and reports for the first time on reconfigurable RF filters using GeTe phase change switches. The conference is held in January 2016 in Austin, TX.

Our paper on phase change RF filters received the best paper award at SiRF 2016 conference
SiRF 2016 - 01/26/2016
Muzhi has earned a Best Paper Award at the 2016 Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF) for his paper, An X-Band Reconfigurable Bandpass Filter Using Phase Change RF Switches. The paper, co-authored by our former post-doc Dr. Feng Lin, describes a tunable filter for wireless communication modules in the x-band frequency range that uses germanium-telluride (GeTe) phase change switches. This is the first implementation of a tunable filter to use GeTe switches.

Azadeh receives yet another award for her research
LNF - 11/30/2015
Azadeh receives Best Poster Award for “Q-Enhanced depletion-mediated AlGaN/GaN acoustic resonators” in Lurie Nano-Fabrication (LNF) Symposium, University of Michigan. This is a competition among the clean room users held at the annual LNF symposium.

Adam Peczalski recieves best posted award at Engineering Graduate Symposium for work on Silica MEMS
CoE - 11/03/2015
Adam received Best Poster Award, 1st place in Integrated Circuits, VLSI, and Microsystems for his work on "Temperature Compensated Fused Silica Resonators Using Embedded Nickel-Refilled Trenches."

Azadeh Ansari receives Richard and Eleanor Towner Prize for Outstanding Ph.D. Research
CoE - 11/03/2015
Azadeh receives this prestigious college-level award given to Ph.D. graduate students. The Towner award highlights the innovation and creativity demonstrated by CoE Ph.D. students, and rewards their outstanding research achievements.

Milad Moosavifar joins the group. Welcome Milad!
Resonant MEMS Group - 09/01/2015
Milad received his B.S. degree from Sharif U. of Technology. He is going to work on GaN acoustic devices.

Mina Rais-Zadeh gives a talk on GaN-based resonators and resonant body transistors at TWHM
Topical Workshop on Heterostructure Microelectronics - 08/26/2015
TWHM workshop focuses on advanced micro- and nano-electronics based on semiconductor heterostructures. Mina was invited to present the work on GaN/AlGaN resonant microsystems

Mina Rais-Zadeh Receives IEEE Sensors Council Early Career Technical Achievement Award
IEEE Sensors Council - 07/24/2015
Dr. Rais-Zadeh has been selected as the recipient of the IEEE 2015 Sensors Council Technical Achievement Award in the area of Sensors Systems and Networks (early career). The citation of your award is as follows: For pioneering research in sensors technology: adaptable nano/micro-electromechanical systems

Congratulation to Azadeh for receiving the best poster award for her work on GaN/AlGaN resonators at the 2015 WIMS2 IAB meeting
WIMS2 - 05/07/2015
Azadeh Ansari received the best poster award of the "high-frequency MEMS" track at the WIMS Industrial Advisory Board Meeting in May 2015. She received the best poster award for her work on GaN MEMS also at the Engineering Graduate Symposium last year.

Congratulations to Roozbeh on his new job: Assistant Professor at University of Florida-Gainsville!
Resonant MEMS Group - 05/01/2015
Roozbeh will start his position as an assistant professor of ECE in September 2015.

Mina Rais-Zadeh is elected to serve on the editorial board of Nature Scientific Reports
Nature - 05/01/2015
Mina is appointed to a two year term on the Editorial Board of Scientific Reports. Scientific Reports is an online, open access journal from the publishers of Nature. It publishes scientifically valid primary research from all areas of the natural and clinical sciences. The 2013 Impact Factor for Scientific Reports is 5.078, according to the 2013 Journal Citation Reports® Science Edition (Thomson Reuters, 2014). This places Scientific Reports 5th among all multidisciplinary science primary research journals.

Azadeh will present two papers both on GaN-based acoustic resonators at the international Symposium on Compound Semiconductors
Resonant MEMS Group - 04/06/2015
Azadeh will present a paper and a poster on recent advancement on GaN acoustic devices and microresonators at the CSW 2015 conference held in Santa Barbara

Two more (late news) papers accepted for presentation at the Transducers 2015 conference in Alaska. The papers are entitled: "A high-Q AlGaN/GaN phonon trap with integrated HEMT read-out," and "Versatile CMOS MEMS integrated piezoelectric platform"
Transducers 2015 - 03/24/2015
What is Transducers late news? The purpose of Late News Abstracts is to enable the "latest" outstanding papers to make it to the conference. It deals with absolutely remarkable and novel achievements that should not be missed, both for the author and the attendees of the conference.

Congratulations to Adam on receiving Michigan Space Grant Consortium Fellowship for the third time
Michigan Space Grant Consortium - 03/03/2015
Adam receives fellowship from Michigan Space Grant Consortium (MSGC) in support of his research on silica-based micromechanical resonators and oscillators. MSGC is funded in part through a NASA training grant.

Congratulations to Muzhi for passing the EE Ph.D. qualification exam
Resonant MEMS Group - 02/04/2015
Muzhi joined the group as a graduate student in Fall 2013. He just passed the qual exam in Feb. 2015. His research is on developing phase change RF switches. See also Muzhi Wang: A Passion for Research

Congratulations to Adam and Roozbeh for having their papers accepted for oral presentation at the Transducers conference
Transducers 2015 - 02/03/2015
Transducers is one of the flagship conferences on MEMS sensors, actuators and integrated micro and nano systems. This year, the meeting is held in Anchorage, Alaska. Adam’s paper is on temperature compensation of silica resonators. Roozbeh discusses his new discovery related to loss mechanisms in piezoelectric resonators.

Congratulations to Muzhi and Feng on having their papers accepted for oral presentation at the IEEE IMS 2015 conference.
IMS 2015 - 02/01/2015
The conference is held in Phoenix, AZ on Many 17-22. Feng’s paper is presented in Session TU3D and Muzhi’s paper in Session WE2C

Mina is selected to serve as a distinguished lecturer for the IEEE Electron Devices Society
IEEE - 01/19/2015
The EDS Distinguished Lecturer Program exists for the purpose of providing EDS Chapters with a list of quality lecturers who can presents talks at local chapter meetings. Mina will serve in this capacity for the period 2015-2017

Mina Rais-Zadeh is elected to serve on the editorial board of the IEEE/ASME Journal of Microelectromechanical Systems (JMEMS)
IEEE - 01/01/2015
Mina is appointed to a three year term on the Editorial Board of JMEMS. JMEMS is the flagship journal of the MEMS society. The Journal of Micrelectromechanical Systems (JMEMS) publishes original and significant contributions, describing advances in the field and relating to the theory, modeling, design, fabrication, assembly and packaging, performance characterization and reliability of microelectromechanical systems (MEMS). In general, JMEMS papers and letters contain experimental data. The JMEMS Editorial Board plays a key role in assuring the archival quality of published papers. One of the Editorial Board members is responsible for the review process of each paper and that Editor is identified in a footnote on the first page of each accepted paper.

Congratulation to Azadeh for receiving the best poster award for her work on "An 8.7 GHz Temperature-Compensated Gallium Nitride Micromechanical Resonator" at the Engineering Graduate Symposium for three times in a row!
CoE - 12/02/2014
Azadeh Ansari received the Engineering Graduate Symposium (EGS) best poster award of the "Integrated Circuits, VLSI, and Microsystems" track(1st place)for the third time. She received this award also in 2012 & 2013.

Mina Rais-Zadeh is invited to give a keynote talk at the MACOM Technology Solutions annual engineering conference
Resonant MEMS Group - 10/27/2014
The conference is held on Oct- 27-28 in Nashua, NH

Our collaborative paper on uncooled AlN resonant infrared detectors is selected for oral presentation at the MEMS 2015 conference
MEMS 2015 - 10/27/2014
The paper reports on an uncooled detector using AlN on Si resonators fabricated using InvenSense Shuttle run process

Zhengzheng paper on ovenized temperature stable silicon oscillators is accepted to MEMS 2015 conference
MEMS 2015 - 10/27/2014
In this work, an oxide-refill process is used to realize passive TCF compensation for silicon MEMS resonators as well as integrated thermal isolation structures. The technology enables fabrication of a low-power ovenized micro-platform on which multiple MEMS devices can be integrated. Intrinsic frequency drifts of two MEMS resonators are utilized for temperature sensing, and closed-loop oven control is realized by phase-locking two MEMS oscillators at a specific temperature.

Mina Rais-Zadeh is invited to present at the Advances in MEMS Seminar held on Oct. 11, 2014 in Milan
InvenSense - 10/11/2014
The Advances in MEMS seminar has invited world renowned professors and industry experts on the leading-edge of sensor development and design, to showcase their latest advancements in the field of miniaturization, navigation, resonators, magnetic sensor architecture, and ‘human-like interface’ design in audio and motion. Featuring distinguished speakers from Berkeley’s Sensor & Actuator Center, University of Michigan, University of California, Davis, Worcester Polytechnic Institute, and Politecnico di Milano.

Dr. Roozbeh Tabrizian will join the Resonant MEMS group in Sept. 2014
Resonant MEMS - 09/01/2014
Roozbeh is moving to our group from Integrated MEMS group at GaTech. We are excited to have him as our newest member starting Sept 1, 2014.

Gallium nitride as an electromechanical material: Watch for the review paper to appear in the Journal of Microelectromechanical Systems
Resonant MEMS Group - 08/21/2014
Our joint review paper with IEMN group on GaN MEMS is accepted for publication in IEEE/ASME JMEMS. The review paper can now be accessed for free from IEEE website.

Congratulations to Dr. Zhengzheng Wu on successfully passing his Ph.D. defense examination.
Resonant MEMS Group - 07/21/2014
Zhengzheng defended his work on "Microelectromechanical Systems for Wireless Radio Front-Ends and Integrated Frequency References." He is headed to the Qualcomm in sunny California.

Zhengzheng will defend on July 21. He is the 4th member of the group to graduate with a Ph.D. degree.
EECS - 07/21/2014
Zhengzheng will defend his Ph.D. thesis on "Microelectromechanical Systems for Wireless Radio Front-Ends and Integrated Frequency References." He will join Qualcomm afterwards.

Congratulations to Dr. Vikrant on successfully passing his Ph.D. defense examination.
Resonant MEMS Group - 07/18/2014
He is headed to the National Institute of Standards and Technology (NIST) in Maryland.

Vikrant will defend his Ph.D. thesis on Friday July 18, 2014
EECS - 07/18/2014
His thesis is entitled "Gallium Nitride Resonators for Infrared Detector Arrays and Resonant Acoustoelectric Amplifiers." His defense is held in 1005 EECS. He will join NIST in August.

Research On GaN-Based Resonators Gives New Insights Into Phonon-Electron Interactions
compound semiconductor - 07/15/2014
Read a brief summary of the paper Phonon-Electron Interactions in Piezoelectric Semiconductor Bulk Acoustic Wave Resonators by Vikrant J. Gokhale and Mina Rais-Zadeh. from Nature Scientific Reports 4, Article number: 5617 doi:10.1038/srep05617 in this report

Vikrant's paper on acoustic loss mechanisms in gallium nitride has been accepted for publication in Nature Scientific Reports.
Resonant MEMS Group - 06/20/2014
The paper is entitled "Phonon-Electron Interactions in Piezoelectric Semiconductor Bulk Acoustic Wave Resonators." It deals with all phonon loss mechanisms in GaN with special focus on phonon-electron loss and acoustoelectric effect.

The paper on "Subwavelength plasmonic absorbers for spectrally selective resonant infrared detectors" by Vikrant and Paul has been accepted for oral presentation at the IEEE SENSORS 2014.
Resonant MEMS Group - 06/18/2014
Vikrant will present his recent results on wavelength selective resonant IR detectors at the IEEE SENSORS 2014 conference, to be held in Valencia, Spain from November 2-5, 2014.

Muzhi's paper on "Directly heated four-terminal phase change switches," received best student paper award honorable mention at the IMS 2014 conference.
IMS - 06/05/2014
The purpose of the competition is to recognize outstanding technical contributions from individual students and to encourage student involvement in research and development in the areas of MTT-S. Muzhi's paper is recognized as top 10 papers presented at the IMS 2014 conference.

Congratulations to Vikram on successfully defending his thesis defense
Resonant MEMS Group - 05/15/2014
Vikram thesis is titled "ALUMINUM NITRIDE-ON-SILICON TEMPERATURE-STABLE RESONATORS AND FILTERS FOR TIMING APPLICATIONS." He defended his Ph.D. thesis on May 15.He will join Sand 9 afterwards.

Mina Rais-Zadeh is promoted to the rank of associate professor of electrical engineering and computer science, with tenure.
The University Record - 05/15/2014
The University of Michigan Board of Regents approved Mina Rais-Zadeh's (Mina Raieszadeh) promotion to the rank of associate professor of electrical engineering and computer science, with tenure, and associate professor of mechanical engineering, without tenure.

Mina Rais-Zadeh is elected to serve on the editorial board of the IEEE Electron Device Letters
Resonant MEMS - 05/08/2014
Mina is appointed to a three year term on the Editorial Board of the IEEE Electron Device Letters (EDL). EDL publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanotechnology, optoelectronics, photovoltaics, power IC's and micro-sensors.The current impact factor of EDL is 2.789

Mina Rais-Zadeh receives 2014 Young Investigator Program Award from Office of Naval Research (ONR YIP) for her work on "Acoustic Phonons and Their Interactions with Electrons in Gallium Nitride Ultra-fast Ultra-scaled Resonators."
ONR - 04/18/2014
The Department of the Navy’s Office of Naval Research (ONR) provides the science and technology necessary to maintain the Navy and Marine Corps’ technological advantage. The YIP program's objectives are to attract outstanding faculty members of Institutions of Higher Education to the Department of Navy's (DoN's) research program, to support their research, and to encourage their teaching and research careers. A total of 24 YIP winners this year were selected from a competitive, diverse pool of nearly 280 candidates.

3 papers accepted for presentation at the Hilton Head Workshop
Resonant MEMS Group - 03/27/2014
Azadeh, Vikram, and Zhengzheng will present the following papers at the HH workshop to be held in June 2014 in Hilton Head, SC: "An 8.7 GHz GaN micromechanical resonator with an AlGaN/GaN HEMT", "A multi-resonator approach for eliminating the temperature dependence of silicon-based references", "Device-layer ovenization of fused silica micromechanical resonators for temperature-stable operation."

Vikram and Zhengzheng's papers accepted to the IEEE IFCS conference (to be held in Taipei, Taiwan)
Resonant MEMS Group - 02/20/2014
Vikram's and Zhengzheng's papers are accepted to the 2014 IFCS conference

Muzhi's paper is selected as best student paper award finalist at the IEEE International Microwave Symposium
IEEE IMS 2014 - 02/19/2014
Muzhi Wang's paper entitled "Directly Heated Four-Terminal Phase Change Switches" is nominated for best student paper award at IMS 2014.

Congratulations to Adam on receiving Michigan Space Grant Consortium Fellowship for the second time
Michigan Space Grant Consortium - 02/18/2014
Adam receives fellowship from Michigan Space Grant Consortium (MSGC) in support of his research on silica-based micromechanical resonators and oscillators. MSGC is funded in part through a NASA training grant.

Congratulations to Azadeh on passing the Doctoral Prelim Exam
Resonant MEMS Group - 01/23/2014
Azadeh has passed the Ph.D. proposal (prelim) exam on Jan. 23, 2014. Her thesis is titled "All-GaN integrated microsystems for RF application."

Our joint paper on "Non-linear characteristics of passive elements on trap-rich high-resistivity Si substrates" receives best paper award (2nd place) at IEEE Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF)
SiRF - 01/22/2014
The paper reports on RF losses and non-linear behavior of RF passive elements such as coplanar transmission lines and inductors on high resistivity silicon. It is a joint work between Université catholique de Louvain (K. Ben Ali, C. Roda Neve, J.-P. Raskin) and our group (Y. Shim, M. Rais-Zadeh). The purpose of the student paper contest is to reward graduate students for exceptional research contributions. Five papers receive best student paper nomination at SiRF; our joint paper received the best student paper award for second place.

Azadeh's paper on multi-GHz resonant body AlGaN/GaN transistor is accepted for publication in the IEEE Transaction on Electron Devices (T-ED)
IEEE - 01/21/2014
A multi-gigahertz AlGaN/GaN resonant body transistor is reported in this paper, wherein the mechanical resonance and electrical signal modulation are achieved simultaneously. A 175 Å thick AlGaN layer is used as the piezoelectric transduction layer, and the two-dimensional electron gas present at the AlGaN/GaN interface is employed as the bottom electrode as well as the transistor conducting channel. The carrier concentration of the channel is modulated when the device undergoes acoustic strain. A quality (Q) factor of 250 is achieved at resonance frequency of 4.23 GHz, marking the highest frequency reported to date for GaN-based resonant body transistors. The frequency × Q of this device is among the best reported for GaN-based resonators

Congratulation to Azadeh for receiving the best poster award for her work on "Resonant AlGaN/GaN HEMT" at the Engineering Graduate Symposium again this year!
CoE - 11/20/2013
Azadeh Ansari received the Engineering Graduate Symposium (EGS) best poster award of the "Integrated Circuits, VLSI, MEMS, & Microsystems" track(1st place)for the second time. She received this award also in 2012.

Vikrant's paper on uncooled resonant infrared detectors is selected for publication in Journal of Microelectromechanical Systems.
Resonant MEMS group - 11/18/2013

Mina Rais-Zadeh is invited to give a talk at China SEMICON Conference
Resonant MEMS Group - 10/25/2013
Mina Rais-Zadeh is invited to give a talk on Advances in MEMS and Sensor Technologies, at the CSTIC conference in conjuction with SEMICON China. The conference is held on March 16-17, 2014 in Shanghai.

Vikram's paper on temperature compensated Lame mode resonators is accepted for oral presentation at the IEEE MEMS 2014 conference
Resonant MEMS Group - 10/25/2013
Vikram will present his paper on "passive temperature compensation of piezoelectrically actuated Lamé mode resonators" at IEEE MEMS 2014 Conference

Yonghyun's paper on the effect of substrate resistivity on the performance of RF passives has been accepted for publication in IEEE MWCL.
Resonant MEMS - 08/30/2013
The paper is entitled " "RF MEMS passives on high-resistivity silicon substrates" and discusses the performance improvement of passives on high resistivity silicon using a trap rich layer.

Mina Rais-Zadeh will give an invited talk at NASA Goddard
Resonant MEMS Group - 08/26/2013
Prof. Mina Rais-Zadeh will give an invited talk on "Chip-Scale Precision Timing Unit for PicoSatellites" at NASA Goddard on Aug. 26

Mina Rais-Zadeh will present an invited talk on "RF MEMS," at the 2013 CMOS Emerging Technologies Research Symposium
Resonant MEMS Group - 07/19/2013
The conference will be held in Hilton Whistler Resort and Spa, Whistler, BC Canada on July 17-19, 2013. The talk will be on July 19.

Congratulations to Vikram on passing the Doctoral Prelim Exam (in ME Department)
Resonant MEMS Group - 07/12/2013
Vikram has passed the Ph.D. proposal exam on July 12, 2013. His thesis is entitled "Design and experimental investigation of AlN-on-silicon micromechanical resonators and filters"

Best poster award at the Transducers/Eurosensors 2013 conference
transducers-eurosensors 2013 - 06/13/2013
Our paper entitled "A low phase-noise Pierce oscillator using a piezoelectric-on-silica micromechanical resonator," received best poster award at the 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)/Eurosensors 2013 conference. This year 1,554 abstracts were submitted and, of these, 236 oral/podium and 439 poster/oral were accepted for presentation at Transducers 2013 & Eurosensors XXVII Conference. Three papers received the outstanding Poster Award.

Mina Rais-Zadeh has been invited to attend the National Academy of Engineering's (NAE) US Frontiers of Engineering Symposium
National Academy of Engineering - 05/29/2013
Mina Rais-Zadeh is one of 81 young engineers invited by the National Academy of Engineering to attend its 19th annual U.S. Frontiers of Engineering meeting.

Congratulations to Vikrant on passing the Doctoral Prelim Exam
Resonant MEMS Group - 04/29/2013
Vikrant has successfully passed the Ph.D. proposal exam on April 29, 2013. His thesis is on development of gallium nitride based uncooled IR detectors

Vikram's paper on "Optimization of tether geometry to achieve low anchor loss in Lamé mode resonators" will be presented at the 2013 International Frequency Control Symposium (IFCS)
Resonant MEMS Group - 04/22/2013
The paper will be presented at the during the joint 2013 UFFC, EFTF, and PFM Symposium in Prague, Czech Republic in July 2013

Results of our collaborative "timing & inertial measurement unit (TIMU)" project has been highlighted in DARPA's recent press release: EXTREME MINIATURIZATION: SEVEN DEVICES, ONE CHIP TO NAVIGATE WITHOUT GPS
DARPA MTO - 04/10/2013
DARPA has issued a press release highlighting our effort toward implementing a timing & inertial measurement unit (TIMU) that contains everything needed to aid navigation when GPS is temporarily unavailable. This project is a collaboration with Prof. Najafi's research group. Our group is working on integrated clocks using Silica-based micromechanical resonators. See also: http://www.wired.com/dangerroom/2013/04/darpa-navigation/

Congratulations to Zhengzheng on passing the Doctoral Prelim Exam
Resonant MEMS Group - 02/27/2013
Zhengzheng has passed the Ph.D. proposal (prelim) exam on Feb. 27, 2013.

Congratulations to Adam on receiving Michigan Space Grant Consortium Fellowship
Michigan Space Grant Consortium - 02/26/2013
Adam receives fellowship from Michigan Space Grant Consortium (MSGC) in support of his research on silica-based micromechanical resonators and oscillators. MSGC is funded in part through a NASA training grant.

Zhengzheng's paper is accepted for poster presentation at the Transducers conference in Barcelona, Spain.
Resonant MEMS Group - 02/16/2013
Zhengzheng Wu will present his paper on "A low phase-noise Pierce oscillator using a piezoelectric-on-silica micromechanical resonator," at the 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers'13).

Congratulations to Yonghyun Shim on successfully passing the dissertation defense exam
Resonant MEMS Group - 02/13/2013
Yonghyun is the first member of the group to graduate with a Ph.D. degree. He defended his thesis on on Feb. 13, 2013.

Yonghyun will defend his Ph.D. work on Feb. 13, 2013
Resonant MEMS Group - 02/13/2013
Yonghyun's defense is scheduled for Feb. 13 at 9 am. Detailed information will be uploaded to the Upcoming EECS Events website.

Azadeh and Adam passed the EECS qualification exam
Resonant MEMS Group - 02/06/2013
Azadeh and Adam qualified to enter the Electrical Engineering Doctoral Program. Congratulations to both!

Mina Rais-Zadeh will present an invited talk on "Temperature compensated silicon resonators for space applications," at the 2013 SPIE Photonics West conference
SPIE - 02/05/2013
This talk presents piezoelectric transduction and frequency trimming of silicon-based resonators with a center frequency in the low megahertz regime. The temperature coefficient of frequency (TCF) of the resonators is reduced using both passive and active compensation schemes. Specifically, a novel technique utilizing oxide-refilled trenches is implemented to achieve efficient temperature compensation while maintaining compatibility with wet release processes. Using this method, we demonstrate high-Q resonators having a first-order TCF as low as 3 ppm/°C and a turnover temperature of around 90 °C, ideally suited for use in ovenized platforms. Using active tuning, the temperature sensitivity of the resonator is further compensated around the turnover temperature. Such devices are ideally suited as timing units in space applications where size, power consumption, and temperature stability are of critical importance.

Two papers accepted for oral presentation at the IEEE MEMS 2013 conference
Resonant MEMS Group - 01/29/2013
Yonghyun will present his paper on phase change switches. Zhengzheng will present our recent results on Silica micromechanical resonators at IEEE MEMS 2013 Conference

Mina Rais-Zadeh will present her current research in High Frequency MEMS as part of MEMS Education Series Webinars
MEMS Industry Group (MIG) - 01/25/2013
Prof. Rais-Zadeh will preent "Innovations in RF MEMS: from the University to Industry" as part of the MIG webinar series on Friday, January 25, 2013 11:30 AM - 12:30 PM EST

Mina Rais-Zadeh receives Elizabeth C. Crosby Award to support her research in Reconfigurable MEMS technology
U. of Michigan - 01/11/2013
Elizabeth C. Crosby Research Fund is to help meet career-relevant needs of individual instructional, research, and clinical track faculty in science and engineering if meeting those needs will help increase the retention or promotion of women scientists and engineers.

Adam receives the best poster award (2nd place) at the WIMS IAB meeting
Resonant MEMS Group - 12/12/2012
Adam's poster was ranked the second best at the WIMS IAB poster session this year in his subject area. The posters were judged by all other poster presenters this year.

Azadeh's paper on "Monolithic Integration of GaN-based Micromechanical Resonators and HEMTs for Timing Applications" was accepted to IEDM
Resonant MEMS Group - 12/12/2012
Azadeh will present her work on GaN resonators and active circuits at the 2012 International Electron Devices Meeting (IEDM)on Dec. 11, 2012.

Mina Rais-Zadeh Receives 2012 NASA Early Career Faculty Research Grant
NASA - 12/12/2012
Dr. Rais-Zadeh has been selected to receive NASA Early Career Faculty Award to develop robust timekeeping technologies that enable more precise landing and autonomous rendezvous in space. For more information see "http://www.nasa.gov/offices/oct/early_stage_innovation/grants/2012_space_tech_research_opps.html"

Congratulation to Azadeh and Vikram for receiving 2012 EGS best poster awards
CoE - 11/06/2012
Azadeh Ansari and Vikram Thakar received the Engineering Graduate Symposium (EGS) best poster award of the MEMS track(1st and 3rd place)

MEMS for tunable RF applications: Has the time FINALLY come?
MEMS Journal - 10/09/2012
Everybody seems to be using their mobile phones for their business and social lives these days, so each new model brings increasingly more features to our portable devices. The problem is that all these new uses bring an explosion of frequency bands that must be packed into one portable device. This can lead to dropped calls and slower web browsing, frustrating users. The answer is...

Mina Rais-Zadeh offered a seminar/webinar as part of the WIMS2 seminar series.
WIMS2.org - 10/05/2012
In this talk Professor Rais-Zadeh talked about the research currently undertaken in the High Frequency MEMS Thrust of WIMS Center and her research group, focusing on advanced RF devices and Microsystems, high-Q acoustic resonators, sensors, and terahertz modulators. Her presentation is available online at (http://wims2.org/media/webinars.html).

Our research on tunable passives receives funding from NSF
Resonant MEMS Group - 09/15/2012
The radio spectrum facilitates a wide variety of applications and services but has become overly crowded, especially in the past two decades. With advances in communications, more and more services rely on high data rate spectrum access. These critical services include banking, social security, telemedicine, and the exchange of technical information. Spectrum resources are in ever-greater demand as new applications emerge and existing ones continue to grow. Unfortunately, acquiring nation-wide broadband access for a new wireless carrier is costly in part because there are only a limited number of spectrum licenses per territory. This project investigates one set of innovations to make national-scale entry less costly.

Gwendolyn Hummel and Muzhi Wang join the Resonant MEMS group
Resonant MEMS Group - 09/01/2012
Gwendolyn Hummel is a summer NNIN intern and will work on phase change switch project. Muzhi Wang will be working on THz modulator project together with Vikram.

Our research on GaN-on-silicon resonators is highlighted in the Semiconductor Today magazine
Semiconductor Today (pp. 96) - 06/30/2012
Semiconductor Today: "University of Michigan and Nitronex Corp presented the first high-performance GaN-on-Si micromechanical resonators and filters. The effective coupling coefficient for the GaN resonator is extracted to be 1.7%, which is among the best reported in the literature... Since the etched sidewall profiles of the devices are not smooth, there are opportunities for performance improvement."

Two papers will be presented at the Hilton Head workshop
Resonant MEMS Group - 06/07/2012
Vikrant, Vikram, and Zhengzheng will present their papers at the Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head Workshop) this year. Congratulations to all.

Mina Rais-Zadeh is elevated to IEEE Senior Member grade
IEEE - 06/01/2012
Dr. Rais-Zadeh is elevated to IEEE Senior Member grade.

Vikram's paper on "Acoustically coupled AlN-on-Si bandpass filters with high-Q notches within the passband" was accepted to the 2012 International Frequency Control Symposium (IFCS)
Resonant MEMS Group - 05/05/2012

Mina Rais-Zadeh will present an invited talk on "Gallium nitride micromechanical resonators for IR detection," at the 2012 SPIE conference
Resonant MEMS Group - 04/30/2012
This talk presents measured results demonstrating an IR detector based on gallium nitride resonant sensors. The transduction mechanism in this work is the pyroelectric perturbation of a piezo-electrically transduced GaN resonator. Using a combination of piezoelectric, pyroelectric, and resonant effect, the sensitivity of the detector can be significantly improved enabling IR detection with NEDTs reaching 5 mK at room temperature.

Vikrant Gokhale will present "A thin film infrared absorber using CNT/nanodiamond nanocomposite" at the 2012 MRS Spring Meeting
Resonant MEMS Group - 04/29/2012

Yonghyun Shim will present "An integrated RF MEMS tunable filter" at the 2012 IEEE MEMS Conference
Resonant MEMS Group - 02/02/2012
Yonghyun's paper was accepted for oral presentation at the IEEE MEMS 2012 conference.

Vikrant Gokhale wins best poster award at the Engineering Graduate Symposium
Resonant MEMS Group - 12/30/2011
Vikrant wins best poster award of the MEMS/Mechatronics section at the 2011 Engineering Graduate Symposium

Two papers will be presented at the IEDM conference
Resonant MEMS Group - 12/08/2011
Azadeh and Zhengzheng will present their papers at the IEDM conference this year. Congratulations to both.

Mina Rais-Zadeh Receives 2011 EDS Early Career Award
EECS News - 12/07/2011
Prof. Mina Rais-Zadeh has been selected to receive a 2011 IEEE Electron Devices Society (EDS) Early Career Award. The award was established in 2009 to honor an outstanding IEEE EDS Graduate of the Last Decade (GOLD). It is awarded annually to an individual to promote, recognize and support Early Career Technical Development within the Electron Devices Society’s field of interest.

Mina Rais-Zadeh Offers the graduate-level course on "RF MEMS" for the second time in Fall 2011
Resonant MEMS Group - 10/01/2011

Yonghyun received the best poster award for his work on RF tunable filters sponsored by Harris at the WIMS IAB meeting
Resonant MEMS Group - 05/05/2011
Congratulations to Yonghyun on receiving best poster award at the WIMS IAB meeting

Mina Rais-Zadeh presented an invited talk on "Characterization and modeling of RF MEMS passive and filters," at 2011 NNIN/C Michigan Symposium
Resonant MEMS Group - 04/20/2011

Vikrant J. Gokhale will present "High-performance bulk-mode gallium nitride resonators and filters," at Transducers 2011 Conference
Resonant MEMS Group - 02/21/2011

Zhengzheng Wu will present "Miniaturized UWB Bandpass Filters Integrated with Notch Filters Using a Silicon-Based Integrated Passive Device Technology" at IEEE IMS 2011 Conference
Resonant MEMS Group - 01/31/2011
The paper is also nominated for best student paper award.

Yonghyun Shim presented "a High-Performance, Temperature-Stable, Continuously Tuned MEMS Capacitor" at IEEE MEMS 2011 Conference
Resonant MEMS Group - 01/26/2011

Mina Rais-Zadeh Received NSF CAREER Award for Work in MEMS
EECS News - 01/21/2011
Mina Rais-Zadeh, assistant professor of Electrical and Computer Engineering, was recently awarded an NSF CAREER grant for her research project, "MEMS Reconfigurable Filters for Multi-Band Low-Power Radios."

Mina Rais-Zadeh presented an invited talk on "Design and fabrication considerations in developing high-Q MEMS capacitors and inductors," at SIRF Conference
Resonant MEMS Group - 01/18/2011

Zhengzheng Wu Awarded Rackham International Student Fellowship
EECS News - 12/23/2010
Zhengzheng Wu, a graduate student in the Electrical Engineering program, received the Rackham International Student Fellowship for 2010-11.

Mina Rais-Zadeh Offers a new graduate-level course on "RF MEMS".
Resonant MEMS Group - 08/01/2010

Vikrant presented his work on acoustoelectric effect at two conferences
Resonant MEMS Group - 06/30/2010
Vikrant's paper on the "Observation of the acoustoelectric effect in Gallium Nitride micromechanical bulk acoustic filters," was presented at 2010 IEEE International Frequency Control Symposium. Vikrant also presented "Q amplification in Gallium Nitride thickness-mode filters using acoustoelectric effect," at the Hilton Head Workshop.

Yonghyun Shim presented "Low-loss MEMS filters with improved out-of-band rejection by exploiting inductive parasitics" at IEEE IEDM 2009 Conference
Resonant MEMS Group - 12/15/2009

 

 

 

 

 

 

 

 

 

 

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