Welcome to the Resonant MEMS Group website. We are a group of researcher working on several exciting MEMS related research projects. Our research interests include integrated RF MEMS, GaN-based micromechanical devices and sensors, MEMS-enabled ICs, wafer-level packaging and micro/nano-fabrication techniques. The Resonant MEMS Group is part of the Wireless Integrated MicroSensing & Systems (WIMS2) Center at the University of Michigan. Recent News Our research on GaN-on-silicon resonators is highlighted in the Semiconductor Today magazine Two papers will be presented at the Hilton Head workshop Dr. Rais-Zadeh is elevated to IEEE Senior Member grade Vikram's paper on "Acoustically coupled AlN-on-Si bandpass filters with high-Q notches within the passband" was accepted to the 2012 International Frequency Control Symposium (IFCS) Current Research Projects Acoustoelectric Effect in Gallium Nitride Micromechanical Bulk Acoustic Filters Analysis of Acoustically Coupled Piezoelectrically Transduced Bandpass Filters Gallium Nitride Micromechanical Resonators for IR Detection MEMS-Reconfigurable Metamaterials for Broadband Terahertz Modulation High-Performance Integrated RF Tunable Components and Filters Wideband Pre-select Filters with Adaptive Narrowband Interference Rejection Capability Single Chip Timing and Inertial Measurement Unit

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