Workshop on Thin Film Metrology WISE 2000

University of Michigan-Ann Arbor, May 8-9, 2000

Attendee List and E-Mail Addresses


Presentation Title


Tutorial: Thin Film Characterization by SE and Modeling Techniques (240 KB)

G.E. Jellison

Ellipsometric Investigation of Ideal Atomically Flat Silicon Crystals: Revisions of Optical Constants (scanned, 7.0 MB)

P. Hess

Modeling the Optical Constants of Diamond-and Zincblende-type Semiconductors: Discrete and Continuum Exciton Effects at E0 and E1

F. H. Pollak

Scatterometry techniques applied to metrology (516 KB)

J. Bao

Spectroscopic Ellipsometric Measurement of SiGe Film Stacks (work-in-progress talk, not posted)

C. Hayzelden

Application of Real Time Stokes Vector Spectroscopy for Characterization of Inhomogeneous Thin Film Growth

P. Rovira

Phase Modulated Ellipsometry with Digital Signal Processing

J. Blanco

Multichannel Muller Matrix Ellipsometer for Real Time Spectroscopy (1.5-5.3eV) of Anisotropic Film Growth

J. Lee

Integrated Metrology: review of applications

J-L Stehle

Overview of Thin Film Characterization:Semiconductor and related industries

T. Ogawa

Characterization of Thin Gate Dielectrics

A. Diebold

Characterization of Porous Dielectric Films (589 KB)

J. N. Cox

Characterization of Photoresist and ARC (389 KB)

P. Schiavone

Characterization of Si:Ge Materials and Layers (834 KB)

C. Pickering

Characterization of SOI (scanned, 7.0 MB)

H. Hovel

DUV (150-350nm) characterization of Materials (582 KB)

P. Boher

In Situ Measurements of Patterned Structures (1.49 MB, viegraphs only)

RCWA Topography Extraction Movie (QuickTime)

F.L. Terry

Broad Spectral Range (1.5 to 6.5eV) Multichannel Ellipsometry for Real Time Characterization of Wide Band Gap Thin Film Growth

J. A. Zapien

In Situ Spectral Transmission Measurements of Thin Films (354 KB)

L. Kamlet

In Situ Monitoring Techniques for MBE

R. Clarke