ElsonYee-hsinLiu

I am a Ph.D. candidate in electrical engineering, specializing in optics, at the University of Michigan, Ann Arbor. I am working with Prof. Fred Terry on liquid-immersion spectroscopic scatterometry for nanoscale topography measurements.

Education

• Ph.D. candidate in electrical engineering, University of Michigan
• M.S.E. in electrical engineering, University of Michigan, 2004
• B.S.E. in optical engineering (with honors), University of Arizona, 2002

Journal publications

1. Wei-Chen Chien, D. S. Dilworth, Elson Liu, E. N. Leith, "Synthetic-aperture chirp confocal imaging," Appl. Opt. 45(3), 501-510 (2006).
2. Elson Liu and Fred L. Terry, Jr., "Immersion scatterometry for improved nano-scale topography measurements", phys. stat. sol. (a), vol. 205, no. 4, pp. 784–788, 2008.

Conference abstracts

1. E. N. Leith, D. Dilworth, W. -C. Chien, K. Mills, B. Athey, and E. Liu, " Synthetic aperture, holographic, chirped confocal process," in Frontiers in Optics, OSA Technical Digest Series (Optical Society of America, 2004), paper FTuO3.
2. Elson Liu and Fred L. Terry, Jr., "Immersion scatterometry for improved nano-scale topography measurements," Fourth International Conference on Spectroscopic Ellipsometry, 11-15 Jun 2007, Stockholm, Sweden.